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> Thermonics t-6100H temperature chuck system
Thermonics t-6100H temperature chuck system
The T-6100 series of temperature chuck systems is comprised of a refrigeration/heating unit with a microprocessor-based temperature controller and a vacuum wafer chuck. The passive chuck does not contain any electronic heating or cooling elements, preventing magnetic field interference. The temperature ranges from -65°C to +135°C with a transition time of 18 minutes from +125°C to -55°C. Refrigerants comply with the Montreal Protocol. Remote control is supported with RS-232 and IEEE 488 interfaces.
