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> Mks instruments 141A baratron vacuum pressure switch
Mks instruments 141A baratron vacuum pressure switch
MKS Instruments Inc. Baratron Vacuum Pressure Switch 141A-13670 -S (091806608190)
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MKS Instruments Inc. Baratron Vacuum Pressure Switch 141A-13670 -S
* Model Number: 141A-13670-S
* Ideal for protection of expensive equipment or processes: high vacuum pumps, mass spectrometers, lasers, plasma systems
* Fully adjustable set point: 0.2% to 100% of Full Scale
* High accuracy set point: 0.5% Full Scale
* Corrosion resistant: all-metal, all-welded construction exposes only Inconel® and stainless steel to gases
* Double pole, two Form C relay contacts
* Fast response switching: 20 msec
* Provide inexpensive process control for opening/closing slow pump and isolation valves, and for turning on/off various types of pumps
* The MKS Types 141 and 142 Vacuum Pressure Switches offer fast, accurate, and reliable protection for vacuum equipment and processes. Designed for applications where a DC signal output is not required, the 141 and 142 provide relay outputs that are readily interfaced with alarms, valve actuators, computers, process controllers, or other protection devices.
* Based on the well-known MKS Baratron capacitance manometer principle of operation, the Types 141/142 sense the deflection of a diaphragm due to applied pressure, providing a switched output when pressure exceeds the chosen set point. An LED provides visual “above set point†indication, and facilitates adjustment of the set point. The dual electrode sensor is an all-metal, all-welded design, thus exposing only corrosion-resistant Inconel to the process gases.
* The 142 is a heated (100 Celsius) version of the Type 141, and is designed to help minimize process effluent buildup that can occur in LPCVD nitride, aluminum etch, and other types of processes.
