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> Mykrolis fv-100D chambergard fast vent diffuser
Mykrolis fv-100D chambergard fast vent diffuser
Mykrolis ChamberGardâ„¢ Fast Vent Diffuser FV-100D
Combines the flow characteristics of a diffuser with a high efficiency filter to reduce particles and vent times in load lock chamber Rapid Venting to Atmosphere.
The choice to reliably increase system throughput by minimizing load lock vent cycle time. The ChamberGard Fast Vent Diffusers provide RAPID venting to atmosphere without disturbing or adding particles to wafers in the chamber.
• Available in Mykrolis’s industry-leading sintered nickel technology in a compact diffuser unit
• Easy installation/retrofit into existing tools with minimal downtime, including load lock chambers, cooling chambers, transfer chambers, and process chambers
• Manufactured by an industry leader in a worldclass facility with ISO-certification
• Manufactured, tested, and packaged in a cleanroom to assure product cleanliness at time of installation
• Removal of particles greater than 0.003 µm from incoming gas
• Rapid vent to atmosphere decreases cycle time, increases throughput and OEE
• Robust and efficient, ChamberGard Diffusers are rated at 100,000 cycles before changeout
